The planarization TECHnology of Chemical-Mechanical-Polishing (CMP), used for the manufacturing of multi- level metal interconnects for high-density Integrated Circuits (IC), is also readily adaptable as an enabling TECHnology in MicroElectroMechanical Systems (MEMS) fabrication, particularly polysilicon surface micromachining. CMP not only eases the design and manufacturability of MEMS devices by eliminating several photolithographic and film issues generated by severe topography, but also enables far greater flexibility with process complexity and associated designs. T
标签： mechanical polishing Chemical
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The mature CMOS fabrication processes are available in many IC foundries. It is cost-effective to leverage the existing CMOS fabrication technologies to implement MEMS devices. On the other hand, the MEMS devices could also add values to the IC industry as the Moore’s law reaching its limit. The CMOS MEMS could play a key role to bridge the gap between the CMOS and MEMS technologies. The CMOS MEMS also offers the advantage of monolithic integration of ICs and micro mechanical components.
标签： TECHnology CMOS MEMS KEY
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Micro-Electro-Mechanical Systems (MEMS) are miniature systems composed ofintegratedelectricalandmechanicalpartstosenseand/orcontrolthingsonaµmscale. The concept of MEMS is attributed to Richard Feynman’s famous talk on December 29th, 1959 [2,3]. Dr. Feynman foresaw many aspects of future MEMS development with his insight in microphysics. In particular, material properties in the µm scale are differentfrombulkpropertiesandthescalingdownofintegratedcircuits(IC)fabrication TECHnology has been a major driving force of MEMS development.
标签： Performance High MEMS RF
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A few years ago I stood before an audience at a customer’s facility explaining the merits of micromachining TECHnology. The small conference room was packed, and all ears were attentive. Everyone was eager to learn about thismysteriousbuzzword, “MEMS.”Although many in the audience were nodding in a sign of comprehension, the glazed lookson their facesbetrayed them. Thisexperience isnot unique, but one that isrepeated frequently in auditoriumsaround the world.
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Over many years, RF-MEMS have been a hot topic in research at the TECHnology and device level. In particular, various kinds of mechanical Si-MEMS resonators and piezoelectric BAW (bulk acoustic wave) resonators have been developed. The BAW TECHnology has made its way to commercial products for passive RF filters, in particular for duplexers in RF transceiver front ends for cellular communica- tions. Beyond their use in filters, micromachined resonators can also be used in conjunction with active devices in innovative circuits and architectures.
标签： MEMS-based Circuits Systems and
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In this age of science and TECHnology, the global economy has developed so much that our lifestyles are now extremely modernized and developed. In some ways, modern society seems to have reached the utmost state of advancement in various areas, including eco- nomic development, science and TECHnology pursuit, and the utilization of the given nat- ural environment. However, it is important to consider approaches that may allow human beings to stay longer on the Earth while enjoying fulfilling and peaceful daily lives.
标签： Ecological Networks Design Smart Home of
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In the present era, low observability is one of the critical requirements in aerospace sector, especially related to defense. The stealth TECHnology essentially relates to shaping and usage of radar absorbing materials (RAM) or radar absorbing struc- tures (RAS). The performance of such radar cross section (RCS) reduction tech- niques is limited by the bandwidth constraints, payload requirements, and other structural issues. Moreover, with advancement of materials science, the structure geometry no longer remains key decisive factor toward stealth.
标签： Fundamentals Design Radar of EM
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In 2001, Orange, a UK mobile network operator, announced the “Orange at Home” project, a smart house incorporating the latest TECHnology wizardry built some 20 miles north of London. It was intended to be more than a mere showcase, with plans for real families to move in and live with the smart home. My then research establishment, the Digital World Research Centre at the University of Surrey, was commissioned to study how these families reacted to their new home, and to report lessons for the future development of smart homes and smart home technologies.
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HIS IS THE THIRD —and most likely the last—book in the series on information TECHnology for energy managers and web based energy infor- mation and control systems. This book concentrates on web based enterprise energy and building automation systems, and serves as a capstone volume in this series. The thrust here is that the highest level functions of a building and facility automation system are provided by a web based EIS/ECS system that provides energy management, maintenance management, overall facility operational management, and ties in with the enterprise resource management system for the entire facility or the group of facilities being managed. If there were ever to be a fourth volume in this series, it would follow the logical progression of the first three volumes, and would probably be titled Web Based Enterprise Resource Management Systems.
标签： Enterprise Energy Based Web
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Resource allocation is an important issue in wireless communication networks. In recent decades, cognitive radio TECHnology and cognitive radio-based networks have obtained more and more attention and have been well studied to improve spectrum utilization and to overcomethe problem of spectrum scarcity in future wireless com- munication systems. Many new challenges on resource allocation appear in cogni- tive radio-based networks. In this book, we focus on effective solutions to resource allocation in several important cognitive radio-based networks, including a cogni- tive radio-basedopportunisticspectrum access network, a cognitiveradio-basedcen- tralized network, a cognitive radio-based cellular network, a cognitive radio-based high-speed vehicle network, and a cognitive radio-based smart grid.
上传时间： 2020-06-07
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