MPU-6500是全球首例9轴运动处理传感器。它集成了3轴MEMS陀螺仪，3轴MEMS加速度计，
上传时间： 2019-12-07
上传用户：finezwl
As a student I did my best to avoid text books – a strange statement for a Professor to make and one that I should clarify before you put this book down; I did my best to avoid text books that did not help me.
标签： Microdevices Ceramic Thick Films MEMS for and
上传时间： 2020-06-06
上传用户：shancjb
The planarization technology of Chemical-Mechanical-Polishing (CMP), used for the manufacturing of multi- level metal interconnects for high-density Integrated Circuits (IC), is also readily adaptable as an enabling technology in MicroElectroMechanical Systems (MEMS) fabrication, particularly polysilicon surface micromachining. CMP not only eases the design and manufacturability of MEMS devices by eliminating several photolithographic and film issues generated by severe topography, but also enables far greater flexibility with process complexity and associated designs. T
标签： mechanical polishing Chemical
上传时间： 2020-06-06
上传用户：shancjb
The mature CMOS fabrication processes are available in many IC foundries. It is cost-effective to leverage the existing CMOS fabrication technologies to implement MEMS devices. On the other hand, the MEMS devices could also add values to the IC industry as the Moore’s law reaching its limit. The CMOS MEMS could play a key role to bridge the gap between the CMOS and MEMS technologies. The CMOS MEMS also offers the advantage of monolithic integration of ICs and micro mechanical components.
标签： TECHNOLOGY CMOS MEMS KEY
上传时间： 2020-06-06
上传用户：shancjb
Five years have passed since the first edition of this book was published.Over the five years,the world has witnessed a technological revolution headlined by an array of exciting consumer and industrial products such as the Nintendo Wii, Apple iPod/iPad, sensor-rich smart phones, phones with cameras,new operating systems for mobile phones and apps,e-books,WiFi,voice- over-IP calls, social networking, 3D animated movies, and cloud computing, to name the major ones that affect everyday living
标签： Foundations MEMS of
上传时间： 2020-06-06
上传用户：shancjb
Nowadays sensors are part of everyday life in a wide variety of fields: scientific applications, medical instrumentation, industrial field, ...and, last but not least, popular mass production and low-cost goods, like smartphones and other mobile devices. Markets and business behind the field of sensors are quite impressive. A common trend for consumer applications is miniaturization which requires, on one side, a lot of research, development efforts, and resources but, on the other hand, allows costs and final application size reduction. In this scenario scientific community and industries are very active to drive innovation.
标签： Magnetometers Lorentz Force MEMS
上传时间： 2020-06-06
上传用户：shancjb
传统集成电路，封装的成本相对较低；但是在某些器件中，封装成本已接近器件成本的1/2；在MEMS/微系统中，封装可能比芯片制造更加困难，成本可能上升为70%～90%；封装已经成为新器件商业化的瓶颈
标签： 半导体封装
上传时间： 2022-01-13
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SCB10H series pressure elements are high performance absolute pressure sensors. The sensors are based on Murata's proven capacitive 3D-MEMS technology. They enable exceptional possibility for OEM customers to integrate pressure measurement function in an optimal way into their products. SCB10H series elements can be designed to match the application specific pressure range. It is a bare capacitive sensor element that enables optimized application specific package and electronics design.
标签： 传感器
上传时间： 2022-03-03
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随着科学水平的提高，生物、化学以及医疗相关器械领域对精度要求也在不断地提升.生物制剂提取、注射，化学药品传输供给以及药物治疗等MEMS的研究不单单是对精密仪器的攻坚克难，更是交叉学科赋予高精密仪器研究发展的难题。技术革新便要理论创新，才能突破现有技术发展的瓶颈。现有的压电超声波雾化器理论发展已颇具成熟，产业化发展也甚是丰富，可是由于产品的不断创新换代，同时也导致理论创新的不同步，致使许多创新产品缺少对应的系统理论支持。本文立足微泵型压电超声波雾化器的研究，提出了系统的雾化理论、结构仿真和雾化效果实验研究。本文主要的研究内容和成果如下：在雾化理论分析方面，通过对雾化片金属基片和锥孔的变形公式推导分析，建立了微泵型压电超声波雾化器雾化理论数学模型，并结合变形分析对其雾化机理进行了完整的阐述在有限元仿真分析计算方面，通过对雾化片简化建模，进行了雾化片的诺响应计算分析，得出雾化片诺响应工作模态及其相应振型。并结合雾化理论分析了各模态相应雾化效果，提出雾化效果改进意见。在雾化效果实验方面，进行多普莉激光测振实验，与诺响应仿真计算相互论证，提高其可行性，并通过雾化效果实验来验证雾化效果理论分析结果，最后结合仿真计算和多普勒激光测振结果综合分析、总结出雾化效果的影响因素。关键词：MEMS，压电泵，超声波，雾化器，压电陶瓷，振型。本文工作在机械结构力学及控制国家重点实验室完成。
标签： 超声波雾化器
上传时间： 2022-06-18
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博世BMI260六轴传感器参考手册，针对智能手机应用的新一代高性能MEMS惯性测量单元(IMU)。
上传时间： 2022-06-27
上传用户：jason_vip1
