The planarization technology of Chemical-Mechanical-Polishing (CMP), used for the manufacturing of multi- level metal interconnects for high-density Integrated Circuits (IC), is also readily adaptable as an enabling technology in MicroElectroMechanical Systems (MEMS) fabrication, particularly polysilicon surface micromachining. CMP not only eases the design and manufacturability of MEMS devices by eliminating several photolithographic and film issues generated by severe topography, but also enables far greater flexibility with process complexity and associated designs. T
标签： mechanical polishing Chemical
上传时间： 2020-06-06
上传用户：shancjb
The mature CMOS fabrication processes are available in many IC foundries. It is cost-effective to leverage the existing CMOS fabrication technologies to implement MEMS devices. On the other hand, the MEMS devices could also add values to the IC industry as the Moore’s law reaching its limit. The CMOS MEMS could play a key role to bridge the gap between the CMOS and MEMS technologies. The CMOS MEMS also offers the advantage of monolithic integration of ICs and micro mechanical components.
标签： TECHNOLOGY CMOS MEMS KEY
上传时间： 2020-06-06
上传用户：shancjb
Thanks to the advances in micromachining fabrication technologies and significant cost reduction due to mass production, miniature sensors of angular rate, or gyroscopes, found their way into the everyday life of every user of modern gadgets, such as smart phones, tablets or even wristwatches. Often without realising, many of us are carrying in our pockets fully equipped with all necessary sensors complete inertial navigation systems that not so long ago were available only for advanced vehicles in sea, land, air or space. Accelerometers and gyroscopes are found in specifications of any gadget supposed to react to user movements. And one of the most commonly used type of gyroscopes used to developed these systems is Coriolis vibratory gyroscope (CVG).
标签： Gyroscopes Vibratory Coriolis
上传时间： 2020-06-06
上传用户：shancjb
For more than three decades, Micro Electro Mechanical Systems (MEMS) have steadily transitioned out of research labs and into production forming a more than $10 billion market [1]. MEMS devices such as accelerometers, pressure sensors and microphones, to name a few, have seen immense utilization, particularly in the consumer electronics market, because of their compact sizes and minute power consumptions. In addition, these devices benefit from batch fabrication, which has enabled year-over-year reductions in cost [2]. In recent years,
上传时间： 2020-06-06
上传用户：shancjb
Micro-Electro-Mechanical Systems (MEMS) are miniature systems composed ofintegratedelectricalandmechanicalpartstosenseand/orcontrolthingsonaµmscale. The concept of MEMS is attributed to Richard Feynman’s famous talk on December 29th, 1959 [2,3]. Dr. Feynman foresaw many aspects of future MEMS development with his insight in microphysics. In particular, material properties in the µm scale are differentfrombulkpropertiesandthescalingdownofintegratedcircuits(IC)fabrication technology has been a major driving force of MEMS development.
标签： Performance High MEMS RF
上传时间： 2020-06-06
上传用户：shancjb
FPGA开发全攻略-工程师创新设计宝典-基础篇+技巧篇-200页第一章、为什么工程师要掌握FPGA开发知识？作者：张国斌、田耘2008 年年初，某著名嵌入式系统IT 公司为了帮助其产品售后工程师和在线技术支持工程师更好的理解其产品，举行了ASIC/FPGA 基础专场培训．由于后者因为保密制度而只能接触到板级电路图和LAYOUT，同时因ASIC/FPGA 都是典型的SoC 应用，通常只是将ASIC/FPGA 当作黑盒来理解，其猜测性读图造成公司与外部及公司内部大量的无效沟通．培训结束后, 参与者纷纷表示ASIC/FPGA 的白盒式剖析极大提高了对产品的理解，有效解决了合作伙伴和客户端理解偏异性问题，参加培训的工程师小L 表示：“FPGA 同时拥有强大的处理功能和完全的设计自由度，以致于它的行业对手ASIC 的设计者在做wafer fabrication 之前, 也大量使用FPGA 来做整个系统的板级仿真，学习FPGA 开发知识不但提升了我们的服务质量从个人角度讲也提升了自己的价值。”实际上，小L 只是中国数十万FPGA 开发工程师中一个缩影，目前，随着FPGA 从可编程逻辑芯片升级为可编程系统级芯片，其在电路中的角色已经从最初的逻辑胶合延伸到数字信号处理、接口、高密度运算等更广阔的范围，应用领域也从通信延伸到消费电子、汽车电子、工业控制、医疗电子等更多领域，现在，大批其他领域的工程师也像小L 一样加入到FPGA 学习应用大军中。未来，随着FPGA 把更多的硬核如PowerPC™ 处理器等集成进来，以及采用新的工艺将存储单元集成，FPGA 越来越成为一种融合处理、存储、接口于一体的超级芯片，“FPGA 会成为一种板级芯片，未来的电子产品可以通过配置FPGA 来实现功能的升级，实际上，某些通信设备厂商已经在尝试这样做了。”赛灵思公司全球资深副总裁汤立人这样指出。可以想象，未来，FPGA 开发能力对工程师而言将成为类似C 语言的基础能力之一，面对这样的发展趋势，你还能简单地将FPGA 当成一种逻辑器件吗？还能对FPGA 的发展无动于衷吗？电子
标签： fpga
上传时间： 2022-04-30
上传用户：fliang
