MEMS中的封装工艺与半导体工艺中的封装具有一定的相似性!因此!早期MEMS的封装 大多借用半导体中现成的工艺%本文首先介绍了封装的主要形式!然后着重阐述了晶圆级封装与芯片级封装&!’%最后给出了一些商业化的实例%
上传时间： 2016-07-26
上传用户：leishenzhichui
MEMS真空封装是提高MEMS惯性器件性能的主要手段。本文应用实验方法，在真空熔焊工艺设备上研究了MEMS器件金属外壳真空封装工艺。对不同镀层结构的外壳进行了封装实验比较和气密性测试，结果发现，金属外壳表面镀Ni和镀Au或管座表面镀Ni和Au、管帽表面镀Ni可有效的提高真空封装的气密性和可靠性，其气密性优于5×10-9 Pa·m3／s。封装样品的高低温循环实验和真空保持特性的测量结果说明，金属外壳真空熔焊工艺可基本满足MEMS器件真空封装工艺的要求，并测得真空度为5 Pa—15 Pa左右。MEMS陀螺仪的封装应用也说明了工艺的可行性。
上传时间： 2016-07-26
上传用户：leishenzhichui
MEMS陀螺在红外成像系统中的研究应用_韩颖
上传时间： 2017-01-17
上传用户：llw_qingquan
基于MEMS陀螺仪的实时电子稳像技术_范永杰
上传时间： 2017-01-17
上传用户：llw_qingquan
A major societal challenge for the decades to come will be the delivery of effective medical services while at the same time curbing the growing cost of healthcare. It is expected that new concepts-particularly electronically assisted healthcare will provide an answer. This will include new devices, new medical services as well as networking. On the device side, impressive innovation has been made possible by micro- and nanoelectronics or CMOS Integrated Circuits. Even higher accuracy and smaller form factor combined with reduced cost and increased convenience of use are enabled by incorporation of CMOS IC design in the realization of biomedical systems. The compact hearing aid devices and current pacemakers are good examples of how CMOS ICs bring about these new functionalities and services in the medical field. Apart from these existing applications, many researchers are trying to develop new bio-medical solutions such as Artificial Retina, Deep Brain Stimulation, and Wearable Healthcare Systems. These are possible by combining the recent advances of bio-medical technology with low power CMOS IC technology.
上传时间： 2017-02-06
上传用户：linyj
For more than three decades, Micro Electro Mechanical Systems (MEMS) have steadily transitioned out of research labs and into production forming a more than $10 billion market [1]. MEMS devices such as accelerometers, pressure sensors and microphones, to name a few, have seen immense utilization, particularly in the consumer electronics market, because of their compact sizes and minute power consumptions. In addition, these devices benefit from batch fabrication, which has enabled year-over-year reductions in cost [2]. In recent years,
上传时间： 2020-06-06
上传用户：shancjb
Micro-Electro-Mechanical Systems (MEMS) are miniature systems composed ofintegratedelectricalandmechanicalpartstosenseand/orcontrolthingsonaµmscale. The concept of MEMS is attributed to Richard Feynman’s famous talk on December 29th, 1959 [2,3]. Dr. Feynman foresaw many aspects of future MEMS development with his insight in microphysics. In particular, material properties in the µm scale are differentfrombulkpropertiesandthescalingdownofintegratedcircuits(IC)fabrication technology has been a major driving force of MEMS development.
标签： Performance High MEMS RF
上传时间： 2020-06-06
上传用户：shancjb
A few years ago I stood before an audience at a customer’s facility explaining the merits of micromachining technology. The small conference room was packed, and all ears were attentive. Everyone was eager to learn about thismysteriousbuzzword, “MEMS.”Although many in the audience were nodding in a sign of comprehension, the glazed lookson their facesbetrayed them. Thisexperience isnot unique, but one that isrepeated frequently in auditoriumsaround the world.
上传时间： 2020-06-06
上传用户：shancjb
Recent advancements in nanotechnology (NT) materials and growth of micro/ nanotechnology have opened the door for potential applications of microelectro- mechanical systems (MEMS)- and NT-based sensors and devices. Such sensors and devices are best suited for communications, medical diagnosis, commercial, military, aerospace, and satellite applications. This book comes at a time when the future and well-being of Western industrial nations in the twenty-first century’s global eco- nomy increasingly depend on the quality and depth of the technological innovations they can commercialize at a rapid pace.
标签： MEMS
上传时间： 2020-06-06
上传用户：shancjb
Over many years, RF-MEMS have been a hot topic in research at the technology and device level. In particular, various kinds of mechanical Si-MEMS resonators and piezoelectric BAW (bulk acoustic wave) resonators have been developed. The BAW technology has made its way to commercial products for passive RF filters, in particular for duplexers in RF transceiver front ends for cellular communica- tions. Beyond their use in filters, micromachined resonators can also be used in conjunction with active devices in innovative circuits and architectures.
标签： MEMS-based Circuits Systems and
上传时间： 2020-06-06
上传用户：shancjb
