The field of microelectromechanical systems (mems), particularly micromachinedmechanical transducers, has been expanding over recent years, and the productioncosts of these devices continue to fall. Using materials, fabrication processes, anddesign tools originally developed for the microelectronic circuits industry, newtypes of microengineered device are evolving all the time—many offering numerousadvantages over their traditional counterparts. The electrical properties of siliconhave been well understood for many years, but it is the mechanical properties thathave been exploited in many examples of mems. This book may seem slightlyunusual in that it has four editors. However, since we all work together in this fieldwithin the School of Electronics and Computer Science at the University of Southampton,it seemed natural to work together on a project like this. mems are nowappearing as part of the syllabus for both undergraduate and postgraduate coursesat many universities, and we hope that this book will complement the teaching thatis taking place in this area.
上传时间： 2013-10-16
上传用户：朗朗乾坤
mems
上传时间： 2013-10-28
上传用户：sdlqbbla
Abstract: Standard PCB design and mounting processes can adversely influence mems inertial sensors.This application note contains guidelines for the layout, soldering, and mounting of mems inertialsensors in LGA packages in order to reduce stresses and improve functionality.
上传时间： 2014-01-15
上传用户：sjb555
mems惯性传感器作为工业应用领用新兴的应用元件，不论在商业、工业还是军工应用上都有着广阔的应用。文中给出了几种mems的在不同领域内的应用范例，并解析了相应的原理，并从一款较常用的mems入手提出了对相应领域内的解决思路。
上传时间： 2013-10-13
上传用户：sc965382896
Abstract: The number of uses for microelectromechanical systems (mems) is growing—they allow us todo jobs once considered impossible. This tutorial explains the applications for mems and the increasingneed to provide precision control and drivers for these devices. Design and manufacturing considerationsare also discussed.
上传时间： 2013-11-12
上传用户：paladin
200680048256-mems谐振器及其制造方法,以及mems振荡器
上传时间： 2013-11-02
上传用户：wangyi39
mems是融合了硅微加工,LIGA和精密机械加工等多种加工技术,并应用现代信息技术构成的微型系统.
上传时间： 2013-10-13
上传用户：66666
国产mems加速度芯片资料，和磁场芯片，这些芯片的资料来源很受限制，现在给大家共享，值得下载啊！
上传时间： 2013-12-10
上传用户：pkkkkp
mems中的常用材料参数，这些参数在mems器件设计仿真过程经常会被用到。
上传时间： 2016-05-02
上传用户：冇尾飞铊
使用微機電 (mems) 設計 Data Acquisition System
标签： Acquisition System mems Data
上传时间： 2013-12-25
上传用户：二驱蚊器
