The mature CMOS fabrication processes are available
in many IC foundries. It is cost-effective to leverage the
existing CMOS fabrication technologies to implement
MEMS devices. On the other hand, the MEMS devices
could also add values to the IC industry as the Moore’s law
reaching its limit. The CMOS MEMS could play a key role
to bridge the gap between the CMOS and MEMS
technologies. The CMOS MEMS also offers the advantage
of monolithic integration of ICs and micro mechanical
components.
